Special Gas
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Special Gas
NO
Cylinder : 47L
Filling : 290psi
Valve : JISS 22-14-OR
Purity : 4N
GeH₄
Cylinder : -
Filling : -
Valve : DISS634
Purity : 5N
HBr
Cylinder : 47L
Filling : 50kg
Valve : CGA330
Purity : 5N5
C₄F₆
Cylinder : 47L
Filling : -
Valve : DISS724
Purity : 3N
BCl₃
Cylinder : 47L
Filling : 50kg
Valve : DISS634
Purity : 5N5
He
Cylinder : 47L
Filling : 150kg/cm2
Valve : DISS718
Purity : 5N/6N
Xe
Cylinder : 50L
Filling : 10,000L
Valve : DISS720
Purity : 5N
