Equipment
Aimed to help accelerate research and development through offering a wide variety of initiatives
Equipment
Overlay
OL-100n for 8”
－ OL-100n has many reference at Korea & China Both.
－ It has many reference Data by Devices. (SIC, CIS, SAW, AL, Oxide etc)
－ Overlay & CD measurement
OL-900n for 12”
－ OL-900n has many reference in Korea & China Both.
－ It’s most advanced equipment, and Mass production in Korea.
LDI
此鐳射直接成像設備，採用亞微米級精密驅控平臺、全新一代DMD控制技術以及光學成像設計，融合天准視覺演算法、融合標定、補償演算法等技術，以確保的成像品質、產能及對位精度。適用於剛性板領域的雙面板、多層板、HDI板，以及FPC、IC載板的影像轉移。此LDI鐳射直接成像設備省去菲林步驟，大幅度降 。數位化工藝，杜絕了菲林本身缺陷造成的批量缺陷，減少菲林的開發過程，可縮短產品開發週期。
技術參數 平臺類型：雙檯面
基板尺寸(mm)：630×660
極限解析(μm)：6
產能：30s/面@20mj/cm²
Chillers
Thermo-electric, Extreme low, Hybrid, Heat exchanger, Compressor
